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Equipment
 電子束蒸鍍機(E-beam) |  射頻磁控濺鍍機(RF Sputter) |  光罩曝光機(Mask Aligner) |
|---|---|---|
 旋轉塗佈機(Spin Coater) |  四點探針(Four-Point Probe) |  恆溫恆濕箱(Climate Chamber) |
 高溫爐(Oven) |  金線打線機(Wire Bouder) |
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電子束蒸鍍機(E-beam) | 射頻磁控濺鍍機(RF Sputter) | 光罩曝光機(Mask Aligner) |
|---|---|---|
旋轉塗佈機(Spin Coater) | 四點探針(Four-Point Probe) | 恆溫恆濕箱(Climate Chamber) |
高溫爐(Oven) | 金線打線機(Wire Bouder) |